When is Si3N4 not Si3N4? When it is a Low Stress SiNx Membrane Window
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چکیده
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2015
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927615005590